Siargo Mass Flow Sensors

ms-fs4308 Mass Flow Sensors

The MF/FS4308 mass flow sensors are for general purpose gas flow monitoring and control applications. This series covers a wide dynamic flow range with a working pressure rating of up to 1 MPa, and a temperature range from -10°C to 55° C. 

The "MF" version has a display while the "FS" version does not.

The products are designed with an easy change of mechanical connectors. The standard connectors are BSPT 1/4”, one‐touch connectors of 4mm, 6mm, or 8 mm. Other customized connectors are available upon request.

The sensing elements are manufactured with Siargo’s proprietary MEMS (micro‐electro‐mechanical systems) thermal mass flow sensing technologies (Thermal‐D®) that measures the calorimetry and diffusivity of the flow medium. The sensor surface is passivated with silicon nitride ceramic materials together with water/oilproof nano‐coating for performance and reliability. Compared to the conventional calorimetric flow sensing technology, this unique sensing approach offers better linearity, removes gas sensitivity for gases with similar thermal diffusivities, and improves temperature performance. It can also auto‐recognize pre‐programmed gases with significant differences in thermal diffusivity. It is the first of a kind in the industry that senses the mass flow with multiple gases without a manual gas conversion factor. As such, it ensures high precision for gas measurements with air calibration.

Thermal-D ® is a trademark of Siargo’s thermal sensing technology.


  • Various mass flow ranges from 0-10 SLPM up to 0-50 SLPM
  • Pressure rating up to 1 MPa
  • Output choices of RS485 or 0.5 to 5VDC
  • Pipe diameter choices of 1,3,8,12 or 19 mm
  • Accuracy of ±1.5% + 0.2 FS