The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog voltage. The FS8003 is for 0-6 SLPM.
- 0-500 sccm for FS8001
- 0-6 SLPM for FS8003
- Typical response time of less than 3 ms
- Non-linear analog output
- Small form factor
- Excellent for detecting filter blockage