Siargo Mass Flow Sensors

FS5001B MEMS Mass Flow Sensor for Manifold Mounting

The FS5001B mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-200 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS5001B can be used in a wide range of applications including mass flow metering for process control, leak detection, HVAC, gas flow metrology and medical applications. The FS5001B requires a power supply of 8-24 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface (RS232) or I2C. Special calibrations available upon request.


  • Low mass flow ranges from 0-200 sccm up to 0-1000 sccm
  • Fast response time of 10 ms
  • Pressure rating up to 5 bar (73 psi)
  • Small form factor  of 48.5 x 48.5 x 18.5 mm3
  • Accuracy of ±2.0% reading plus ±0.5% FS
  • Outputs include linear analog 0.5 - 4.5V , digital RS232 or I2C