Siargo Mass Flow Sensors

FS4001 MEMS Mass Flow Sensor

The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS4001 can be used in a wide range of applications including instrumentation (such as mass spectrometry), leak detection, process control, gas flow metrology and medical applications. The FS4001 requires a power supply of 8-18 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface (RS232). The calibration is generally performed with nitrogen at 20 °C and 101.325 kPa pressure rating. Calibration with other gases and conditions is available upon request.


  • Low mass flow ranges from 0-30 sccm up to 0-1000 sccm
  • Fast response time of 4 ms (selectable)
  • Pressure rating up to 5 bar (73 psi)
  • Accuracy of ±1.5%
  • Outputs include linear analog 0.5 - 4.5 V or digital RS232
  • Measures 62 x 52 x 12.8 mm3