Siargo Mass Flow Sensors

Siargo Mass Flow Sensors

Siargo offers a wide range of off-shelf mass flow sensors to erve today's increasing demands of flow measurement, monitoring and control in energy, medical, food & beverage, machinery, environmental and many other industries.

8 Items found

FS4003/4008 Mass Flow Sensors

The FS4000 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The products are designed for reliability with excellent performance in targeted applications. The sensors are housed in 3 mm and 8 mm pipes with maximum flow rate of 5 SLPM and 50 SLPM. 

FS4001 MEMS Mass Flow Sensor

The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS4001 can be used in a wide range of applications including instrumentation (such as mass spectrometry), leak detection, process control, gas flow metrology and medical applications. The FS4001 requires a power supply of 8-18 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface (RS232). The calibration is generally performed with nitrogen at 20 °C and 101.325 kPa pressure rating. Calibration with other gases and conditions available upon request.

FS5001B MEMS Mass Flow Sensor for Manifold Mounting

The FS5001B mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-200 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS5001B can be used in a wide range of applications including mass flow metering for process control, leak detection, HVAC, gas flow metrology and medical applications. The FS5001B requires a power supply of 8-24 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface (RS232) or I2C. Special calibrations available upon request.

FS6122 Bi-Directional Medical Respiratory Sensor

The FS6122 is a medical respiratory sensor to measure from -250 to +250 SLPM with a linear analog output or I2C output.  A gauge pressure sensor is integrated into the FS6122 with a range of -5 to +40 cc H2O with a linear analog or I2C output. 

FS7002 Mass Flow/Filter Clog Sensor

The FS7002 are mass flow sensors designed to detect filter clogging. The sensors are designed for open space air flow measurement for monitoring the airflow status behind any air filter. The air velocity passes through the sensor via a specially designed venturi channel to proivde the stability of the air flow for the measurement. The compact design of the sensor provides easy installation and minimal obstruction of the air pathway. Typical applications include but are not limited to filter clog sensing in an intelligent air filter in an LCD projector and other electronics products, ceiling filter fans modules, ventilation duct flow or fan motor status.

FS8001/FS8003 Small Mass Flow Sensor

The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog voltage. The FS8003 is for 0-6 SLPM. 

AM1000 Series MEMS Environmental Meter

The AM1000 Series is designed for air velocity measurement in a closed conduit or open space, with optional temperature and humidity sensing data (AM1100 model). The sensing elements are made on a specially designed MEMs structure that enhances the measurement accuracy and response time while lowering the power consumption. The RS485 (Modbus) and Bluetooth LE options are ready for networking or remote communication. This format is ideal for residential HVAC or smart home applications.

FS1015 CL Mass Flow Sensors

The FS1015CL mass flow sensors are manufactured using proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for medical equipment such as ventilators for flow monitoring and control. 2 flow rates are available, 0-100 SLPM and 0-150 SLPM. The compact package design enables a large dynamic flow range with a pressure drop of 1300 Pa (about 13 cm H2O). This package withstands a maximum pressure of 29 psi without compromising performance.