Mass Flow Sensors

PMF83000 Series Mass Air Flow Sensor for Medical Devices & Industrial Applications

The PMF83000 features Posifa's third-generation flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise and repeatability. Designed for respiratory care and other medical and instrumentation applications.

The PMF83000 Mass Air Flow Sensor is designed for flow rates from 0-15 SLPM up to 0-100 SLPM and provides both analog voltage and digital I2C outputs.


  • Various flow ranges from 0-15 SLPM to 0-100 SLPM
  • Flow repeatability of 0.5% FS
  • Long-term stability with minimal null drift
  • Solid-state sensing core (no surface cavity or fragile membrane, resistant to clogging and pressure shock)
  • Fast response time of less than 5 ms
  • Supply voltage of 5VDC 
  • Linear analog output of 0.5 to 4.5 VDC or digital I2C output
  • Overpressure of 50 psi


  • Medical respirators, ventilators, oxygen concentrators & anesthesia equipment
  • Anesthesia delivery
  • Environmental monitoring
  • Fuel cell control