Mass Flow Meters

Please read this special announcement about the discontinuation of Servoflo's distribution business

MF5100 MEMS Mass Flow Meter

The MF5100 is a state of the art MEMS mass flow sensor with limited gas automatic recognition capability and optional battery power operation. It provides a variety of output options with further customization available.

MF5100 mass flow meter comes in 3 different variations:

  • MF5106 for 0-30 SLPM
  • MF5108 for 0-50 SLPM
  • MF5110 for 0-100 SLPM


  • Directly sense mass flow using thermal mass flow principle
  • Proprietary MEMs sensor package design for better reliability
  • D cell lithium ion battery option or 12-24 VDC external power
  • Weight of less than 1 kg
  • Dimensions of 132 mm x 41 mm x 134 mm
  • Output options include RS485, 4-20 mA, or 0-5V analog output