Mass Flow Sensors

ESRF-ESF Board Level Restrictive MEMS Mass Flow Sensor for Gas

ES Systems has developed the ESRF-ESF, an inline mass flow sensor for gas, based on the hot-film anemometer principle. The ESRF-ESF is one of the few gas flow sensors featuring bi-directional gas flow sensing up to ±300 ln/min (about 322 SLPM) with a total error and of <1.25% RD. The sensor provides a calibrated and temperature-compensated output on an SPI or I2C bus or an analog output making them plug & play for direct interfacing to low voltage MCU's and systems. The user is provided with a multitude of interface and output options allowing for the right sensor configuration can be selected based on the specific requirements for each application.


  • High accuracy & resolution
  • <1.25% RD total error band
  • Bi-directional flow measurement
  • Gas flow sensor up to ±300 ln/min (about 322 SLPM)
  • Temperature compensation from 0°C to 50°C
  • Low temperature drift
  • Compact size

Typical Uses

  • Industrial
  • Medical
  • Fuel Cells
  • Clog detection

Pricing Guide