Mass Flow Sensors

ESRF-ESF Board Level Restrictive MEMS Mass Flow Sensor for Gas

ES Systems has developed the ESRF-ESF, an inline mass flow sensor for gas, based on the hot-film anemometer principle. The ESRF-ESF is one of the few gas flow sensors featuring bi-directional gas flow sensing up to ±300 ln/min (about 322 SLPM) with a total error and of <1.25% RD. The sensor provides a calibrated and temperature-compensated output on an SPI or I2C bus or an analog output making them plug & play for direct interfacing to low voltage MCU's and systems. The user is provided with a multitude of interface and output options allowing for the right sensor configuration can be selected based on the specific requirements for each application.

**All new inquiries for these parts should contact ES Systems directly via their Contact Us page. You may also contact us with any questions and we can forward your inquiry accordingly.**


  • High accuracy & resolution
  • <1.25% RD total error band
  • Bi-directional flow measurement
  • Gas flow sensor up to ±300 ln/min (about 322 SLPM)
  • Temperature compensation from 0°C to 50°C
  • Low temperature drift
  • Compact size

Typical Uses

  • Industrial
  • Medical
  • Fuel Cells
  • Clog detection

Pricing Guide