The CAFS4000 mass flow sensor is fabricated using a MEMS flow sensor chip. It is suitable for the measurement of clean and relatively dry gases for various purposes. The CAFS4000 has a range of 0-500 SLPM. Excellent sensitivity, high reliability, and high stability make the CAFS4000 an excellent mass flow sensor.
The CAFS4000 has a high precision digital processor and calibration circuit, integrated A/D converter and logic with internal calibration. The sensing signal is effectively collected in real-time and the corresponding compensation algorithm is processed internally, eliminating the need for external calibration.
Features
- Wide flow range 0-500 SLPM
- High precision (1.5% FS)
- Linear output and temperature compensation
- Minimal zero drift
- Solid-state sensing core
- Analog output of 1-5V or I2C
- Fast response time of 20 ms
Applications
- Ventilators & respirators
- Oxygen concentrators & conservers
- Anesthesia delivery
- Leak detection
- Mass flow controller
- Fuel cell control