Silicon Microstructures Pizoresistive Pressure Sensors

Silicon Microstructures

Silicon Microstructures, Inc. (SMI) was founded in 1991 as a commercial source of high-performance silicon pressure sensors.  Now part of TE Connectivity family of pressure sensors, these parts continue to innovate, especially for low pressure applications.

SM1111/SM1131 Barometric Pressure Sensors

SM1111/SM1131 Barometric Pressure Sensors

Properties
Pressure Medium: Air/Gas
Sensor Type: Absolute, Barometric
Supply Voltage: Under 5V, 5V
Output Signal: Digital
Pressure Range: 3-300 psi
Kind: Board Level

The SM1111/SM1131 are absolute pressure sensors for barometric air pressure measurement (BAP). The sensors include a piezo-resistive pressure sensor die and a signal processing IC to perform amplification and thermal compensation of the pressure sensor output. The SM1111 have a pressure range of 15-115 kPa with a ratiometric analog output.

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SM1XXX Digital & Analog Pressure Sensor for 15 psi - Differential or Gauge

SM1XXX Digital & Analog Pressure Sensor for 15 psi - Differential or Gauge

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge, Differential
Supply Voltage: 5V
Output Signal: Voltage, Digital
Pressure Range: 3-300 psi
Kind: Board Level

The SM1XXX Series is a digital/analog pressure sensor for 15 psi with a digital, fully-conditioned in a SOIC-16 package with either dual vertical or horizontal ports. It is available in both compound gauge, differential pressure or asymmetric configurations. 

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SM4XXX Gauge & Differential Pressure Sensors Medium Ranges

SM4XXX Gauge & Differential Pressure Sensors Medium Ranges

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge, Differential
Supply Voltage: Under 5V
Output Signal: Voltage, Digital
Pressure Range: 4” H2O to 3 psi, 3-300 psi
Kind: Board Level

The SM4XXX Series is a digital and analog, medium pressure MEMS sensor family offering state-of-the-art pressure transducer and CMOS mixed signal processing technology to produce a digital, fully-conditioned, multi-order pressure and temperature-compensated sensor in SOIC-16 package with a dual vertical porting option.

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SM5420 Absolute Pressure Sensor With Millivolt Output

SM5420 Absolute Pressure Sensor With Millivolt Output

Properties
Pressure Medium: Air/Gas
Sensor Type: Absolute
Supply Voltage: 5V
Output Signal: Millivolt
Pressure Range: 3-300 psi
Kind: Board Level

The SM5420 is a small outline SO-8 packaged pressure sensor. The sensor is intended for high volume applications where cost is a critical factor, such as consumer tire pressure gauges or automotive tire pressure monitoring. 

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SM5G-GG Series Pressure Sensor With mV Output

SM5G-GG Series Pressure Sensor With mV Output

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge
Supply Voltage: Under 5V, 5V
Output Signal: Millivolt
Pressure Range: 3-300 psi
Kind: Board Level

The SM5G-GG Series is a small outline SO8 packaged pressure sensor that incorporates new SM30G MEMS piezoresistive pressure sensing die. The SM5G-GG Series has been optimized to provide the highest possible accuracy for a package of this size. Performance is achieved through careful resistor placement and mechanical configuration along with advanced MEMS processing.

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SM5XXX, 6XXX & 7XXX Ultra Low Pressure Sensors With Digital or Analog Output

SM5XXX, 6XXX & 7XXX Ultra Low Pressure Sensors With Digital or Analog Output

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge, Differential
Supply Voltage: Under 5V
Output Signal: Digital
Pressure Range: Under 4” H2O, 4” H2O to 3 psi
Kind: Board Level

The SM5XXX, SM6XXX, and SM7XXX are ultra low pressure MEMS sensor families offering state of the art pressure transducer technology and a CMOS mixed signal processing technology to produce a digital or analog, fully-conditioned, multi-order pressure and temperature-compensated sensor in JEDEC standard SOIC-16 packaging with dual ports (horizontal or vertical). 

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SM6250 Ultra Low Pressure Sensor has ASIC

SM6250 Ultra Low Pressure Sensor has ASIC

Properties
Pressure Medium: Air/Gas
Sensor Type: Differential
Supply Voltage: Under 5V
Output Signal: Millivolt
Pressure Range: 4” H2O to 3 psi
Kind: Board Level

The SM6250 Series combines state-of-the-art sensor technology with CMOS mixed-signal processing technoogy in a low profile SOIC-16 package with dual holes. Pressure is measured from the backside, while additional protection to the electronic circuitry is provided by protective gel on the topside. 

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SM6295 Analog Gauge Pressure Sensor for 40 cmH2O

SM6295 Analog Gauge Pressure Sensor for 40 cmH2O

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge
Supply Voltage: 5V
Output Signal: Voltage
Pressure Range: 4” H2O to 3 psi
Kind: Board Level

SM6295 is an amplified gauge pressure sensor calibrated from 0-40 cmH2O. The sensor has state-of-the-art mixed signal processing to provide a fully calibrated and temperature compensated pressure sensor. The sensor can be mounted directly on a printed circuit board without the need for additional circuitry. The sensor is pressurized from the backside to protect topside electronics.

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SM6841 Ultra Small Absolute Pressure Sensor With mV Output

SM6841 Ultra Small Absolute Pressure Sensor With mV Output

Properties
Pressure Medium: Air/Gas
Sensor Type: Absolute
Supply Voltage: Under 5V
Output Signal: Millivolt
Pressure Range: 3-300 psi
Kind: Board Level

The SM6841 is a small outline SO-8  packaged pressure sensor that incorporates SMI's new piezoresistive pressure sensing die. This sensor is intended for high volume applications where cost is a critical factor. 

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SM6844 Absolute Pressure Sensor With Compensated Analog Output

SM6844 Absolute Pressure Sensor With Compensated Analog Output

Properties
Pressure Medium: Air/Gas
Sensor Type: Absolute
Supply Voltage: Under 5V
Output Signal: Voltage
Pressure Range: 3-300 psi
Kind: Board Level

The SM6844 Series is an absolute pressure sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce an analog, fully-conditioned, pressure and temperature-compensated sensor in JEDEC standard SOIC-16 packaging with a single horizontal porting option. 

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SM923X Ultra Low Gauge Pressure Sensor

SM923X Ultra Low Gauge Pressure Sensor

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge
Supply Voltage: Under 5V
Output Signal: Digital
Pressure Range: Under 4” H2O
Kind: Board Level

The SM923X Series are digital, ultra low gauge pressure sensors for extremely low air pressures. 3 calibration ranges are available:

  • SM9233: 0 to +250 Pa (0-1" H2O)
  • SM9235: 0 to +300 Pa
  • SM9236: 0 to + 600 Pa

In addition, users have a choice of accuracies when ordering - either 3%FS, 2.5% FS or 1.5% FS after autozero. The sensors have a 16-bit I2C digital pressure calibrated and temperature-compensated output. The SM923X Series have a standard SOIC-16 package with a dual vertical port.

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SM9333/SM9336 Ultra Low Differential Pressure Sensor

SM9333/SM9336 Ultra Low Differential Pressure Sensor

Properties
Pressure Medium: Air/Gas
Sensor Type: Differential
Supply Voltage: Under 5V
Output Signal: Digital
Pressure Range: Under 4” H2O

The SM9333/9336 are digital, ultra-low pressure sensors offering state-of-the-art MEMS pressure transducer technology and CMOS mixed signal processing to produce a digital, fully-conditioned, multi-order pressure and temperature-compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option. It is available as a differential pressure sensor. 

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SM9543 Ultra Low Differential Pressure Sensor

SM9543 Ultra Low Differential Pressure Sensor

Properties
Pressure Medium: Air/Gas
Sensor Type: Differential
Supply Voltage: Under 5V
Output Signal: Digital
Pressure Range: Under 4” H2O
Kind: Board Level

The SM9543 Series is an ultra low differential pressure sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option.  

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SM9D/SM9G Uncompensated SO-16 Pressure Sensor

SM9D/SM9G Uncompensated SO-16 Pressure Sensor

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge, Differential
Supply Voltage: Under 5V
Output Signal: Millivolt
Pressure Range: 4” H2O to 3 psi
Kind: Board Level

The low pressure SM9D/SM9G series incorporates SMI's unique pressure die to achieve high performance in pressure ranges of 0.15, 0.6 & 1.5 psi full-scale in gauge or differential configurations. 

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Uncompensated SM5470 Pressure Sensor With Millivolt Output

Uncompensated SM5470 Pressure Sensor With Millivolt Output

Properties
Pressure Medium: Air/Gas
Sensor Type: Gauge, Differential
Supply Voltage: 5V
Output Signal: Millivolt
Pressure Range: 4” H2O to 3 psi, 3-300 psi
Kind: Board Level

The SM5470 series pressure sensors are surface-mountable Dual-in-line packages (SOIC-16) designed for a broad range of high volume, OEM manufactures of various consumer, automotive, medical, and industrial products. NOTE: Not for new designs.

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