Siargo Mass Flow Sensors

Siargo Mass Flow Sensors

Siargo offers a wide range of off-shelf mass flow sensors to serve today's increasing demands of flow measurement, monitoring and control in energy, medical, food & beverage, machinery, environmental and many other industries.

AM1000 Series MEMS Environmental Meter

AM1000 Series MEMS Environmental Meter

The AM1000 Series is designed for air velocity measurement in a closed conduit or open space, with optional temperature and humidity sensing data (AM1100 model). The sensing elements are made on a specially designed MEMs structure that enhances the measurement accuracy and response time while lowering the power consumption. The RS485 (Modbus) and Bluetooth LE options are ready for networking or remote communication. This format is ideal for residential HVAC or smart home applications.

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FS1015 CL Mass Flow Sensors

FS1015 CL Mass Flow Sensors

The FS1015CL mass flow sensors are manufactured using proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for medical equipment such as ventilators for flow monitoring and control. 2 flow rates are available, 0-100 SLPM and 0-150 SLPM. The compact package design enables a large dynamic flow range with a pressure drop of 1300 Pa (about 13 cm H2O). This package withstands a maximum pressure of 29 psi without compromising performance. 

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FS4001 MEMS Mass Flow Sensor

FS4001 MEMS Mass Flow Sensor

The FS4001 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-30 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS4001 can be used in a wide range of applications including instrumentation (such as mass spectrometry), leak detection, process control, gas flow metrology and medical applications. The FS4001 requires a power supply of 8-18 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface (RS232). The calibration is generally performed with nitrogen at 20 °C and 101.325 kPa pressure rating. Calibration with other gases and conditions available upon request.

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FS4003/4008 Mass Flow Sensors

FS4003/4008 Mass Flow Sensors

The FS4000 mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The products are designed for reliability with excellent performance in targeted applications. The sensors are housed in 3 mm and 8 mm pipes with maximum flow rate of 5 SLPM and 50 SLPM. 

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FS5001B MEMS Mass Flow Sensor for Manifold Mounting

FS5001B MEMS Mass Flow Sensor for Manifold Mounting

The FS5001B mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and packaging technology. The sensors are specially designed for low flow rates from 0-200 sccm up to 0-1000 sccm. With a high overpressure of 5 bar (73 psi), the FS5001B can be used in a wide range of applications including mass flow metering for process control, leak detection, HVAC, gas flow metrology and medical applications. The FS5001B requires a power supply of 8-24 VDC and provides an analog (0.5 to 4.5 VDC) and/or digital user interface (RS232) or I2C. Special calibrations available upon request.

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FS6122 Bi-Directional Medical Respiratory Sensor

FS6122 Bi-Directional Medical Respiratory Sensor - Measures Flow Rate & Gauge Pressure, Humidity & Temp

The FS6122 is a medical respiratory sensor to measure from -250 to +250 SLPM with a linear analog output or I2C output.  A gauge pressure sensor is integrated into the FS6122 with a range of -5 to +40 cc H2O with a linear analog or I2C output. 

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FS7002 Mass Flow/Filter Clog Sensor

FS7002 Mass Flow/Filter Clog Sensor

The FS7002 are mass flow sensors designed to detect filter clogging. The sensors are designed for open space air flow measurement for monitoring the airflow status behind any air filter. The air velocity passes through the sensor via a specially designed venturi channel to proivde the stability of the air flow for the measurement. The compact design of the sensor provides easy installation and minimal obstruction of the air pathway. Typical applications include but are not limited to filter clog sensing in an intelligent air filter in an LCD projector and other electronics products, ceiling filter fans modules, ventilation duct flow or fan motor status.

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FS8001/FS8003 Small Mass Flow Sensor

FS8001/FS8003 Small Mass Flow Sensor

The FS8001 mass flow sensors have a fast response time of 5 ms and are designed for filter clogging. The FS8001 is for 0-500 sccm and has a nonlinear analog voltage. The FS8003 is for 0-6 SLPM. 

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MF4000 Mass Flow Meter

MF4000 Mass Flow Meter

The MF4000 Series Mass Flow Meters are designined for applications in gas flow within a flow channel diameter of 3 mm or 8 mm. Plastic finishing with an easy change of mechanical adaptors allows for applications with different connection thread requirements.

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MF4600 Gas Flow Sensor for Metering & Control

MF4600 Gas Flow Sensor for Metering & Control

Properties
Supply Voltage: Under 5V
Output Signal: Millivolt
Pressure Range: Under 4” H2O

The MF4600 Series mass flow meters are made with Siargo's proprietary MEMS sensing technology. It applies or clean and dry gas metering and control. The meter is designed with the structure of a rotameter but with the full capability of digital gas mass flow metrology and LED display. 

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MF5000 MEMS Mass Flow Meter

MF5000 MEMS Mass Flow Meter

MF5000 series mass flow meters are specially designed for small pipe flow monitoring and feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.5FS)% or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.

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MF5100 MEMS Mass Flow Meter

MF5100 MEMS Mass Flow Meter

The MF5100 is a state of the art MEMS mass flow sensor with limited gas automatic recognition capability and optional battery power operation. It provides a variety of output options with further customization available.

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MF5200 Oxygen Mass Flow Meter

MF5200 Oxygen Mass Flow Meter

The MF5200 Series oxygen flow meters are designed specifically for oxygen metering systems in medical equipment. These meters are operated with the standard industrial user interfaces (RS485), and user-defined alarm functions for better monitoring or control over the network. The off-the-shelf products (MF5212 and MF5219) are for gas flow measurement of 0-300 SLPM and 0-800 SLPM respectively.

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MF5600 MEMS Mass Flow Meter

MF5600 MEMS Mass Flow Meter

The MF5600 mass flow meters are designed for general purpose yet precise industrial gas measurement, monitoring or control. The design is for applications where the display must be placed separately from the meter body or flow channel.

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MF5700 MEMS Mass Flow Meter

MF5700 MEMS Mass Flow Meter

The MF5700 mass flow meters come in 2 models. The MF5706 has a flow range of 0-10 SLPM or 0-25 SLPM. The MF5712 has a range of 0-200 SLPM. The MF5700 features cost effective ultra low power operating on 4 AA batteries. The portable design has excellent exchangeable mechanical adaptors, easy data accessible and user programmable capabilities. The internal data storage can also help for many industrial on-site applications. The meters can be customized for various general purpose flow applications. LCD output is included along with an optional RS485 output.

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MFG Mass Flow Meters

MFG Mass Flow Meters

The MFG Series mass flow meters are powered by battery and offer a wide dynamic range while mainiting the high sensitivity at low flows for gas monitoring and measurement. The meters have RS485 Modbus communication interface that is ready for remote data logging or networking. Storage designed in the control circuitry allows the user to program the records of the flow status  which can be transmitted via the network or downloaded with a handheld or personal computer.

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